NANOLITHOGRAPHY: RAPID lithography achieves λ/20 resolution (Laser Focus World)
Linjie Li, Rafael R. Gattass, Erez Gershgoren, Hana Hwang, John T. Fourkas: Achieving λ/20 Resolution by One-Color Initiation and Deactivation of Polymerization. In: Science May 2009: Vol. 324. no. 5929, pp. 910 - 913